Test key having a chain circuit and a kelvin structure

Details Test key having a chain circuit and a kelvin structure Test key having a chain circuit and a kelvin structure

2006-09-12

2006-09-12

Flynn, Nathan J. (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Test or calibration structure

C257S797000, C257SE21521, C324S763010, C324S756010, C324S1540PB

Reexamination Certificate

active

07105856

ABSTRACT:
A test key formed on a semiconductor substrate has a plurality of electronic components, a plurality of conductors, a plurality of vias for connecting the electronic components and the conductors, a first pad, a second pad, a third pad, and a fourth pad. The first pad, the electronic components, the vias, the conductors, and the second pad connects in series to form a chain circuit, and the first pad and the second pad are positioned at two ends of the chain circuit. A Kelvin structure is composed of the third pad, the fourth pad, one of the conductors, one of the vias, and one of the electronic components.

REFERENCES:
patent: 5514974 (1996-05-01), Bouldin

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