Measuring and testing – Surface and cutting edge testing – Roughness
Reexamination Certificate
2006-05-02
2006-05-02
Larkin, Daniel S. (Department: 2856)
Measuring and testing
Surface and cutting edge testing
Roughness
Reexamination Certificate
active
07036357
ABSTRACT:
A scanning probe microscope method and apparatus that modifies imaging dynamics using an active drive technique to optimize the bandwidth of amplitude detection. The deflection is preferably measured by an optical detection system including a laser and a photodetector, which measures cantilever deflection by an optical beam bounce technique or another conventional technique. The detected deflection of the cantilever is subsequently demodulated to give a signal proportional to the amplitude of oscillation of the cantilever, which is thereafter used to drive the cantilever.
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Adderton Dennis M.
Minne Stephen C.
Boyle Fredrickson Newholm Stein & Gratz S.C.
Larkin Daniel S.
Veeco Instruments Inc.
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