Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2006-04-25
2006-04-25
Lee, John R. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S306000, C250S307000, C250S309000, C250S3960ML, C250S3960ML, C250S397000, C250S398000, C250S492100, C250S492200, C250S492210, C250S492300
Reexamination Certificate
active
07034297
ABSTRACT:
A method and apparatus for use in monitoring a sample with a charged particle beam are presented. A mechanical displacement between a plane defined by the sample's surface and an optical axis defined by a beam directing arrangement is provided so as to orient the sample at a certain non-right angleθ1with respect to the optical axis. A primary charged particle beam propagating towards the sample is deflected so as to affect the trajectory of the primary charged particle beam to provide a certain non-zero angleθ2between the primary beam propagation axis and said optical axis.
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Adamec Pavel
Krayvitz Igor
Petrov Igor
Rosenberg Zvika
Applied Materials Israel, Ltd.
Fahmi Tarek N.
Lee John R.
Souw Bernard E.
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