Special receptacle or package – Holder for a removable electrical component – For a semiconductor wafer
Reexamination Certificate
2006-07-11
2006-07-11
Gehman, Bryon P. (Department: 3728)
Special receptacle or package
Holder for a removable electrical component
For a semiconductor wafer
C206S454000, C206S459100
Reexamination Certificate
active
07073667
ABSTRACT:
A semiconductor wafer, substrate, or reticle storage or shipping device that includes a photochromic indicator of exposure to undesired electromagnetic radiation. The present invention includes the incorporation of a photochromic material into the plastic used to fabricate at least a portion of a semiconductor wafer, disk, or reticle shipping or storage containers. The container may include photochromic material in the form of a transparent window or a larger portion of the container. The photochromic material may change color or darkness in response to exposure to a selected range of wavelengths of light.
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Burns John
Forbes Martin L.
Fuller Matthew A.
King Jeffery J.
Smith Mark V.
Entegris, Inc.
Gehman Bryon P.
Patterson Thuente Skaar & Christensen P.A.
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