Standard reference for metrology and calibration method of...

Details Standard reference for metrology and calibration method of... Standard reference for metrology and calibration method of...

2006-07-18

2006-07-18

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S252100, C250S491100, C250S492200

Reexamination Certificate

active

07078691

ABSTRACT:
The present invention is to provide a standard reference for metrology having finer reference sizes and high-precision electron-beam metrology including the same. By using a standard reference member in which a grating unit pattern of a pitch size proven by an optical diffraction angle by using a laser beam whose wavelength is absolutely guaranteed and a plurality of patterns having a finer size than that (100 nm or less) over the same substrate, fineness and correctness of calibration are made verifiable on a regular basis, and by using an electron-beam collective exposure method for pattern fabrication, fabrication of this standard reference is made possible.

REFERENCES:
patent: 5422723 (1995-06-01), Paranjpe et al.
patent: 2004/0263846 (2004-12-01), Kwan
patent: 07-071947 (1995-03-01), None
patent: 2004-251682 (2004-09-01), None

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