Electron microscopy system and electron microscopy method

Details Electron microscopy system and electron microscopy method Electron microscopy system and electron microscopy method

2006-09-12

2006-09-12

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S307000, C250S305000

Reexamination Certificate

active

07105814

ABSTRACT:
A probe-forming electron microscopy system1(SEM) is proposed which comprises a position-sensitive detector15. As a result, position-dependent secondary electron intensities in the object plane7or angle-dependent secondary electron intensities in the object plane7may be observed.

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