Image analysis – Image transformation or preprocessing – Measuring image properties
Reexamination Certificate
2006-05-30
2006-05-30
Mehta, Bhavesh M. (Department: 2625)
Image analysis
Image transformation or preprocessing
Measuring image properties
C382S282000, C382S284000, C358S504000, C358S520000
Reexamination Certificate
active
07054506
ABSTRACT:
A method of measuring a pattern by using a display microscope image comprises a step of setting an edge detection reference line by designating a range of detecting an edge and a number of edge points with regard to a respective side portion of the pattern in the microscope image, a step of sampling the edge point constituting a point of changing a brightness from image information by searching the edge point from a direction orthogonal to the set edge detection reference line, a step of providing a line approximating the respective side portion of the pattern based on position information of a plurality of the edge points and a step of specifying a shape of the pattern by an intersecting point of two pieces of lines, a specified point provided by a plurality of intersecting points, an angle made by two pieces of straight lines and a distance between two specified points from information of the approximated line approximating the respective side portion of the pattern.
REFERENCES:
patent: 6069733 (2000-05-01), Spink et al.
patent: 6072624 (2000-06-01), Dixon et al.
patent: 6483948 (2002-11-01), Spink et al.
patent: 6555816 (2003-04-01), Sawahata et al.
patent: 6674884 (2004-01-01), Bacus et al.
Adams & Wilks
Kassa Yosef
Mehta Bhavesh M.
SII NanoTechnology Inc.
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