Semiconductor wafer boat for a vertical furnace

Details Semiconductor wafer boat for a vertical furnace Semiconductor wafer boat for a vertical furnace

2006-04-25

2006-04-25

Wilson, Gregory A. (Department: 3749)

Heating

Accessory means for holding, shielding or supporting work...

C211S041180

Reexamination Certificate

active

07033168

ABSTRACT:
A wafer boat for use in heat treatment of semiconductor wafers in a vertical furnace comprises support rods extending generally vertically when the wafer boat is placed in the vertical furnace. Fingers are supported by and extend along vertical extent of the support rods. Wafer holder platforms are adapted to be supported by groups of fingers lying in generally different common horizontal planes. The fingers are adapted to underlie the wafer holder platforms and support the platforms at the support locations. The fingers and wafer holder platforms each have a respective first overall maximum thickness. The support location of at least one of the fingers and the wafer holder platforms have a second maximum thickness less than the first overall maximum thickness.

REFERENCES:
patent: 5820367 (1998-10-01), Osawa
patent: 6056123 (2000-05-01), Niemirowski et al.
patent: 6095806 (2000-08-01), Suzuki et al.
patent: 6287112 (2001-09-01), Van Voorst Vader et al.
patent: 6474987 (2002-11-01), Nakai et al.
patent: 6488497 (2002-12-01), Buckley et al.
patent: 6716027 (2004-04-01), Kim et al.
patent: 6796439 (2004-09-01), Araki
patent: 06333865 (1994-12-01), None
patent: 2000021958 (2000-01-01), None
patent: 2000127020 (2000-05-01), None
patent: 2000164522 (2000-06-01), None
patent: 2000208428 (2000-07-01), None
patent: 2000232151 (2000-08-01), None
patent: 2001102318 (2001-04-01), None
patent: 2002093731 (2002-03-01), None
patent: 2003258064 (2003-09-01), None
patent: 2004014985 (2004-01-01), None

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