Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2005-02-08
2005-02-08
Thornton, Yvette C. (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S281100, C430S282100, C430S320000, C430S905000, C430S913000
Reexamination Certificate
active
06852466
ABSTRACT:
The present invention provides novel photoresist compositions that comprise a resin binder, a photoacid generator compound and an added amine component. In a first aspect, the added amine preferably is 1) non-aromatic 2) has from about 9 to about 16 carbon atoms, 3) contains no primary or secondary amine groups, and/or 4) contains no multiple tertiary amine groups where two tertiary groups are separated by a linkage of optionally substituted ethylene. In a related aspect, the added amine is a non-aromatic amine that comprises either 1) a tertiary nitrogen alicyclic ring member, and preferably is at junction position between a bicyclic or other multi-ring ring system; or 2) a tertiary nitrogen that is not a ring member, and is substituted by at least two tertiary or quaternary carbon radicals.
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Database WPI, Section Ch, Week 199919, Derwent Publications Ltd., London, GB; AN 1999-218980, XP002133479 & JP 11 052575 A (Sumitomo Chem Co Ltd), Feb. 26, 1999 *Abstract.
Taylor Gary N.
Trefonas, III Peter
Corless Peter F.
Edwards & Angell LLP
Frickey Darryl P.
Shipley Company L.L.C.
Thornton Yvette C.
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