Semiconductor device including metal insulator semiconductor...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S204000, C257S338000, C257S407000

Reexamination Certificate

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06967379

ABSTRACT:
A semiconductor device comprises a semiconductor substrate, an N-channel MISFET and a P-channel MISFET provided on the semiconductor substrate, each of the N- and P-channel MISFETs being isolated by an isolation region and having a gate insulating film, a first gate electrode film provided on the gate insulating film of the N-channel MISFET and composed of a first metal silicide, a second gate electrode film provided on the gate insulating film of the P-channel MISFET and composed of a second metal silicide made of a second metal material different from a first metal material composing the first metal silicide, and a work function of the first gate electrode film being lower than that of the second gate electrode film.

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Kouji Matsuo, Semiconductor Device and Method of Manufacturing the Same, U.S. Appl. No. 10/396,453, filed Mar. 26, 2003.
Kouji Matsuo et al., “Semiconductor Device and Method of Manufacturing the Same”, U.S. Appl. No. 09/492,780, filed Jan. 28, 2000.
Copy of Japanese Patent Office Action entitled “Notification of Reasons for Rejection,” issued by the Japanese Patent Office on May 10, 2005 in counterpart Application No. 2002-322094 and its English translation.

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