Microwave induced plasma source

Details Microwave induced plasma source Microwave induced plasma source

1990-02-01

1992-02-04

Laroche, Eugene R.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511151, 315112, 31323131, H01J 724

Patent

active

050862553

ABSTRACT:
A microwave induced plasma source includes a coaxial waveguide made up of a cylindrical outer conductor and an inner conductor which has the form of a helical coil, a discharge tube inserted into the helical coil in the axial direction thereof, and having an inner tube for introducing a sample and an outer tube for introducing a plasma gas so that a double tube structure is formed, a discharge-tube cooling device for causing a cooling gas to flow along the outer periphery of the discharge tube in directions parallel to the axis thereof, and a microwave power source for supplying microwave power to the coaxial waveguide. When the microwave induced plasma source is used as the light source of a spectrometer or the ion source of a mass spectrometer, a trace element can be readily determined qualitatively or quantitatively.

REFERENCES:
patent: 3484650 (1969-12-01), Rendina
patent: 3492074 (1970-01-01), Rendina
patent: 4306175 (1981-12-01), Schleicher et al.
patent: 4517495 (1985-05-01), Piepmeier
patent: 4804838 (1989-02-01), Miseki
patent: 4818916 (1989-04-01), Morrisroe
patent: 4902099 (1990-02-01), Okamoto et al.
patent: 4908492 (1990-03-01), Okamoto et al.
Abadallah et al., "An Assessment of an atmospheric pressure helium microwave plasma produced by a surfatron as an excitation source in atomic emission spectroscopy", Spectrochimica Acta, vol. 37B, No. 7, pp. 583-592, 1982.

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