Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate
2005-02-01
2005-02-01
McDonald, Rodney G. (Department: 1753)
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
C204S192170, C204S192180, C204S192220, C438S003000, C427S126300, C427S372200, C427S383100, C427S363000
Reexamination Certificate
active
06849166
ABSTRACT:
In a manufacturing method for a piezoelectric actuator a first electrode layer is formed on substrate, a ferroelectric thin film is formed on the first electrode layer, and an inorganic protective layer4is formed on the ferroelectric thin film. Then, the inorganic protective layer4and the ferroelectric thin film are heat-treated under an oxygen containing atmosphere, and a second electrode layer is formed on an oxidation diffusion layer, wherein the oxidation diffusion layer is formed on a surface of the ferroelectric thin film as a result of component diffusion of the ferroelectric thin film and oxidation of the inorganic protective layer4due to the heat treatment. By using this method, it is possible to improve ferroelectricity without deterioration or cracking of a surface of the ferroelectric thin film.
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Matsushita Electric - Industrial Co., Ltd.
McDonald Rodney G.
Wenderoth , Lind & Ponack, L.L.P.
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