Method for wafer position data retrieval in semiconductor...

Details Method for wafer position data retrieval in semiconductor... Method for wafer position data retrieval in semiconductor...

2005-06-21

2005-06-21

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S104000, C700S110000, C438S005000

Reexamination Certificate

active

06909932

ABSTRACT:
Semiconductor products, especially semiconductor wafers, are processed according to a defined sequence of orders with the products arranged in a container. Product processing data of product processing steps are stored with reference to product position data identifying product positions in the product containers. When the position of products in a container is required, a product handling order is defined and integrated in the predefined sequence of orders thereby resulting in an extended sequence of orders. The product processing steps and the product handling step are executed in compliance with the extended sequence of orders and product position change data are stored. All slot-related semiconductor processing information are thereby automatically brought in conformity with the actual material flow in cases where handling steps are executed that change the semiconductor positions upon irregular processing execution.

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Author not listed: “Sorting and Transfer Drive Mechanism”, IBM Technical Disclosure Bulletin, vol. 33, No. 6A, Nov. 1990, pp. 134-143.

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