Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2005-06-21
2005-06-21
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S104000, C700S110000, C438S005000
Reexamination Certificate
active
06909932
ABSTRACT:
Semiconductor products, especially semiconductor wafers, are processed according to a defined sequence of orders with the products arranged in a container. Product processing data of product processing steps are stored with reference to product position data identifying product positions in the product containers. When the position of products in a container is required, a product handling order is defined and integrated in the predefined sequence of orders thereby resulting in an extended sequence of orders. The product processing steps and the product handling step are executed in compliance with the extended sequence of orders and product position change data are stored. All slot-related semiconductor processing information are thereby automatically brought in conformity with the actual material flow in cases where handling steps are executed that change the semiconductor positions upon irregular processing execution.
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Author not listed: “Sorting and Transfer Drive Mechanism”, IBM Technical Disclosure Bulletin, vol. 33, No. 6A, Nov. 1990, pp. 134-143.
Haschke Silka
Wintergerst Andreas
Greenberg Laurence A.
Infineon Technologies
Lee Douglas S.
Locher Ralph E.
Picard Leo
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