Measuring and testing – Instrument proving or calibrating – Displacement – motion – distance – or position
Reexamination Certificate
2005-12-27
2005-12-27
Raevis, Robert (Department: 2856)
Measuring and testing
Instrument proving or calibrating
Displacement, motion, distance, or position
Reexamination Certificate
active
06978654
ABSTRACT:
A method of calibrating an AFM scanner head of an AFM machine to determine the arc functions of the scanner head are provided. A method of measuring the actual orientation of an AFM tip in conjunction with the arc functions provides a way to know and control the actual AFM tip orientation for performing better AFM scans, obtaining more accurate depth measurements into a deep feature, and obtaining better portrayals of specific portions of a deep feature in AFM images. AFM images focusing on portraying specific portions of a deep feature structure may be combined to form a composite image of a representative deep feature for a sample.
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Infineon - Technologies AG
Raevis Robert
Slater & Matsil L.L.P.
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