Real-time process control for optical component fabrication

Details Real-time process control for optical component fabrication Real-time process control for optical component fabrication

2005-06-28

2005-06-28

Hassanzadeh, Parviz (Department: 1763)

Coating apparatus

With indicating, testing, inspecting, or measuring means

C156S345240, C427S008000

Reexamination Certificate

active

06911090

ABSTRACT:
A method and system for controlling the fabrication of an optical device having a given property at a defined wavelength. The method comprises the steps of providing a substrate, depositing a material on the substrate to form a film thereon, and controlling a set of manufacturing parameters as the film is being formed on the substrate to make the optical device. The method comprises the further steps of generating an optical signal having a given wavelength, dithering the wavelength of the optical signal, and applying the dithered optical signal to the film being formed on the substrate to modulate the optical signal. A correlation signal is generated to represent the difference between the given wavelength and the defined wavelength, and that correlation signal is used to adjust at least one of the manufacturing parameters to make the optical device with said given property at the defined wavelength.

REFERENCES:
patent: 3713042 (1973-01-01), Kinsel
patent: 4311725 (1982-01-01), Holland
patent: 4332833 (1982-06-01), Aspnes et al.
patent: 5658418 (1997-08-01), Coronel et al.
patent: 5737109 (1998-04-01), Goodwin
patent: 6712927 (2004-03-01), Grimbergen et al.
patent: 10336154 (1998-12-01), None
Bann, R., et al., “Micromachining system accommodates large wafers,” Laser Focus World, www.optoelectronics-world.com, pp. 189-192, Jan. 2001.
Kartalopoulos, S.,“Introduction to DWDM Technology Data in a Rainbow,” IEEE, Chapter 3, pp. 67-68, (1999).
Carroll, J., et al.,“Distributed feedback semiconductor lasers,” IEE Circuits, Devices and Systems Series 10, SPIE Press Monograph, vol. PM52, pp. 9-15, (1998).

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