Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate
2005-10-18
2005-10-18
Thompson, A. M. (Department: 2825)
Computer-aided design and analysis of circuits and semiconductor
Nanotechnology related integrated circuit design
C716S030000, C430S005000
Reexamination Certificate
active
06957414
ABSTRACT:
A method is used to check the direct convertibility of integrated semiconductor circuits into alternating phase masks. This is done by explicitly localizing the phase conflicts occurring in the corresponding layout while solely using the technological requirements made of the design. The set of phase conflicts determined with the aid of this formalism is complete and minimal and thus proves to be an optimum starting point for methods for handling conflicts of this type.
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Ludwig Burkhard
Moukara Molela
Dimyan Magid Y.
Greenberg Laurence A.
Infineon - Technologies AG
Locher Ralph E.
Stemer Werner H.
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