Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate
2005-07-12
2005-07-12
Font, Frank G. (Department: 2877)
Photocopying
Projection printing and copying cameras
Focus or magnification control
C355S053000, C355S071000, C355S077000, C430S005000, C430S022000, C430S322000, C250S492200
Reexamination Certificate
active
06917411
ABSTRACT:
Optimizing printing of an image from an alternating phase shifting mask having a phase shift error is accomplished using off-axis illumination. By simulating the image using varying off-axis illumination parameters, optimized parameters are selected to compensate for the phase shift error. Once the off-axis illumination parameters are optimized, the image is shot. In addition, the method of varying off-axis illumination parameters to compensate for a phase shift error permits an alternating phase shifting mask to be shot at two different wavelengths.
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Jeng Nanseng
Pierrat Christophe
Brown Khaled
Font Frank G.
Micro)n Technology, Inc.
Schwegman Lundberg Woessner & Kluth P.A.
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