Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

2005-01-25

2005-01-25

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S305000

Reexamination Certificate

active

06847038

ABSTRACT:
A scanning electron microscope with an energy filter which can positively utilize secondary electrons and/or reflected electrons which collide against a mesh electrode and are lost. The scanning electron microscope which has a porous electrode for producing an electric field for energy-filtering electrons produced by applying a primary electron beam to a sample and a 1st electron detector which detects electrons passing through the porous electrode is characterized by further having a porous structure provided near the sample, a deflector which deflects electrons from the axis of the primary electron beam, and a 2nd electron detector which detects the electrons deflected by the deflector.

REFERENCES:
patent: 4554455 (1985-11-01), Todokoro et al.
patent: 5118941 (1992-06-01), Larson
patent: 5389787 (1995-02-01), Todokoro et al.
patent: 5493116 (1996-02-01), Toro-Lira et al.
patent: 5608218 (1997-03-01), Sato et al.
patent: 5872358 (1999-02-01), Todokoro et al.
patent: 6043491 (2000-03-01), Ose et al.
patent: 6091249 (2000-07-01), Talbot et al.
patent: 6646262 (2003-11-01), Todokoro et al.
patent: 6667476 (2003-12-01), Todokoro et al.
patent: 853243 (1998-07-01), None
patent: 10-313027 (1998-11-01), None
patent: WO 9946798 (1999-09-01), None

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