Low-GIDL MOSFET structure and method for fabrication

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S344000, C257S389000, C257S900000, C257SE21422, C257SE21421, C257SE29152, C257SE29133

Reexamination Certificate

active

06841826

ABSTRACT:
A low-GIDL current MOSFET device structure and a method of fabrication thereof which provides a low-GIDL current. The MOSFET device structure contains a central gate conductor whose edges may slightly overlap the source/drain diffusions, and left and right side wing gate conductors which are separated from the central gate conductor by a thin insulating and diffusion barrier layer.

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