Methods and devices for evaluating imaging characteristics...

Details Methods and devices for evaluating imaging characteristics... Methods and devices for evaluating imaging characteristics...

2005-03-01

2005-03-01

Young, Christopher G. (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Including control feature responsive to a test or measurement

C430S296000, C430S942000, C250S3960ML, C250S397000, C250S492200, C250S492210, C250S492220, C250S492230, C250S492300, C355S055000, C355S067000, C355S077000

Reexamination Certificate

active

06861187

ABSTRACT:
Methods and devices are disclosed for evaluating the imaging performance of a charged-particle-beam (CPB) microlithography system. An embodiment of such a device includes a knife-edged pattern region defining multiple knife-edged apertures that are longitudinally extended. Each aperture includes a respective knife-edge on each of its two respective longitudinal edges. A charged particle beam having a rectangular transverse profile is scanned across the apertures such that the beam reaches a knife-edge on an adjacent aperture before the previous knife-edge exhibits radiation-induced deterioration. Furthermore, each of the knife-edges can be swept multiple times by respective beam scans performed at different locations in the longitudinal direction. Hence, measurements can be performed many times (e.g., hundreds of times) using a single knife-edged pattern region.

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