4. Radiation imagery chemistry: process, composition, or product th
  5. Including control feature responsive to a test or measurement

Takehisa Yahiro

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Charged particle beam transfer mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Charged-particle-beam microlithographic methods for...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Devices for measuring and adjusting illumination uniformity...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Electron beam imaging
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Durable reference marks for use in charged-particle-beam...

Active solid-state devices (e.g. – transistors – solid-state diode – Alignment marks
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Methods and devices for evaluating beam blur in a...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Profile ID: LFUS-PAI-P-2046109

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