Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
Reexamination Certificate
2005-03-08
2005-03-08
Blum, David S. (Department: 2813)
Semiconductor device manufacturing: process
Formation of electrically isolated lateral semiconductive...
Total dielectric isolation
Reexamination Certificate
active
06864149
ABSTRACT:
A semiconductor-on-insulator structure includes a substrate and a buried insulator layer overlying the substrate. A plurality of semiconductor islands overlie the buried insulator layer. The semiconductor islands are isolated from one another by trenches. A plurality of recess resistant regions overlie the buried insulator layer at a lower surface of the trenches.
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Chen Hao-Yu
Hu Chenming
Tsao Hsun-Chih
Yang Fu-Liang
Yeo Yee-Chia
Blum David S.
Slater & Matsil L.L.P.
Taiwan Semiconductor Manufacturing Company
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