Stage apparatus, exposure apparatus and method for exposing...

Details Stage apparatus, exposure apparatus and method for exposing... Stage apparatus, exposure apparatus and method for exposing...

2005-03-08

2005-03-08

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S073000, C355S076000

Reexamination Certificate

active

06864955

ABSTRACT:
The stage apparatus has a movable stage structure body which holds a substrate plate to be processed and is movable on a base structure body. This stage apparatus comprises a receipt edge orifice disposed at least at a portion of a fluid path which is disposed at said stage structure body; and a feed edge orifice being detachably engageable with said receipt edge orifice at a predetermined position on a base structure body and providing or discharging a predetermined fluid to the receipt edge orifice during said engagement of said feed edge orifice with said receipt edge orifice.

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