Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1995-04-14
1996-04-16
Powell, William
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
1566281, 1566571, 7351418, 7351423, 26 2, H01L 2100
Patent
active
055079113
ABSTRACT:
A monolithic, micromechanical vibrating string accelerometer with a trimmable resonant frequency is fabricated from a silicon substrate which has been selectively etched to provide a resonant structure suspended over an etched pit. The resonant structure comprises an acceleration sensitive mass and at least two flexible elements having resonant frequencies. Each of the flexible elements is disposed generally colinear with at least one acceleration sensitive axis of the accelerometer. One end of at least one of the flexible elements is attached to a tension relief beam for providing stress relief of tensile forces created during the fabrication process. Mass support, beams having a high aspect ratio support the mass over the etched pit while allowing the mass to move freely in the direction colinear with the flexible elements. Also disclosed is a method for fabricating such an accelerometer with high aspect ratio tension relief and mass support beams.
REFERENCES:
patent: Re32931 (1989-05-01), Staudte
patent: Re33479 (1990-12-01), Juptner et al.
patent: 3053095 (1962-09-01), Koril et al.
patent: 3251231 (1966-05-01), Hunt et al.
patent: 3370458 (1968-02-01), Dillon
patent: 3696429 (1972-10-01), Tressa
patent: 3913035 (1975-10-01), Havens
patent: 4044305 (1977-08-01), Oberbeck
patent: 4122448 (1978-10-01), Martin
patent: 4144764 (1979-03-01), Hartzell, Jr.
patent: 4155257 (1979-05-01), Wittke
patent: 4234666 (1980-11-01), Gursky
patent: 4321500 (1982-03-01), Paros et al.
patent: 4336718 (1982-06-01), Washburn
patent: 4342227 (1982-08-01), Petersen et al.
patent: 4381672 (1983-05-01), O'Connor et al.
patent: 4406992 (1983-09-01), Kurtz et al.
patent: 4411741 (1983-10-01), Janata
patent: 4414852 (1983-11-01), McNeill
patent: 4447753 (1984-05-01), Ochiai
patent: 4468584 (1984-08-01), Nakamura et al.
patent: 4478076 (1984-10-01), Bohrer
patent: 4478077 (1984-10-01), Bohrer et al.
patent: 4483194 (1984-11-01), Rudolf
patent: 4484382 (1984-11-01), Kawashima
patent: 4490772 (1984-12-01), Blickstein
patent: 4495499 (1985-01-01), Richardson
patent: 4499778 (1985-02-01), Westhaver et al.
patent: 4502042 (1985-02-01), Wuhrl et al.
patent: 4522072 (1985-06-01), Sulouff et al.
patent: 4524619 (1985-06-01), Staudte
patent: 4538461 (1985-09-01), Juptner et al.
patent: 4585083 (1986-04-01), Nishiguchi
patent: 4590801 (1986-05-01), Merhav
patent: 4592242 (1986-06-01), Kempas
patent: 4596158 (1986-06-01), Strugach
patent: 4598585 (1986-07-01), Boxenhorn
patent: 4600934 (1986-07-01), Aine et al.
patent: 4619001 (1986-10-01), Kane
patent: 4621925 (1986-11-01), Masuda et al.
patent: 4628283 (1986-12-01), Reynolds
patent: 4629957 (1986-12-01), Walters et al.
patent: 4639690 (1987-01-01), Lewis
patent: 4644793 (1987-02-01), Church
patent: 4651564 (1987-03-01), Johnson et al.
patent: 4653326 (1987-03-01), Danel et al.
patent: 4654663 (1987-03-01), Alsenz et al.
patent: 4665605 (1987-05-01), Kempas
patent: 4670092 (1987-06-01), Motamedi
patent: 4671112 (1987-06-01), Kimura et al.
patent: 4674180 (1987-06-01), Zavracky et al.
patent: 4674319 (1987-06-01), Muller et al.
patent: 4674331 (1987-06-01), Watson
patent: 4679434 (1987-07-01), Stewart
patent: 4680606 (1987-07-01), Knutti et al.
patent: 4699006 (1987-10-01), Boxenhorn
patent: 4705659 (1987-11-01), Bernstein et al.
patent: 4706374 (1987-11-01), Murakami
patent: 4712439 (1987-12-01), North
patent: 4727752 (1988-03-01), Peters
patent: 4735506 (1988-04-01), Pavlath
patent: 4736629 (1988-04-01), Cole
patent: 4743789 (1988-05-01), Puskas
patent: 4744248 (1988-05-01), Stewart
patent: 4744249 (1988-05-01), Stewart
patent: 4747312 (1988-05-01), Herzl
patent: 4750364 (1988-06-01), Kawamura et al.
patent: 4761743 (1988-08-01), Wittke
patent: 4764244 (1988-08-01), Chitty et al.
patent: 4776924 (1988-10-01), Delapierre
patent: 4783237 (1988-11-01), Aine et al.
patent: 4789803 (1988-12-01), Jacobsen et al.
patent: 4792676 (1988-12-01), Hojo et al.
patent: 4805456 (1989-02-01), Howe et al.
patent: 4808549 (1989-02-01), Mikkor et al.
patent: 4808948 (1989-02-01), Patel et al.
patent: 4834538 (1989-05-01), Heeks
patent: 4851080 (1989-07-01), Howe et al.
patent: 4855544 (1989-08-01), Glenn
patent: 4869107 (1989-09-01), Murakami et al.
patent: 4882933 (1989-11-01), Petersen et al.
patent: 4884446 (1989-12-01), Ljung
patent: 4890812 (1990-01-01), Chechile et al.
patent: 4893509 (1990-01-01), MacIver et al.
patent: 4895616 (1990-01-01), Higashi et al.
patent: 4898032 (1990-02-01), Voles
patent: 4899587 (1990-02-01), Staudte
patent: 4900971 (1990-02-01), Kawashima
patent: 4901586 (1990-02-01), Blake et al.
patent: 4916520 (1990-04-01), Kurashima
patent: 4922756 (1990-05-01), Henrion
patent: 4929860 (1990-05-01), Hulsing, II et al.
patent: 4981359 (1991-01-01), Tazartes et al.
patent: 4981552 (1991-01-01), Mikkor et al.
patent: 5001383 (1991-03-01), Kawashima
patent: 5016072 (1991-05-01), Greiff
patent: 5038613 (1991-08-01), Takenaka et al.
patent: 5045152 (1991-09-01), Sickafus
patent: 5090809 (1992-02-01), Ferrar
patent: 5094537 (1992-03-01), Karpinski, Jr.
patent: 5138883 (1992-08-01), Paquet et al.
patent: 5205171 (1993-04-01), O'Brien et al.
patent: 5226321 (1993-07-01), Varnham et al.
patent: 5233874 (1993-08-01), Putty et al.
patent: 5241861 (1993-09-01), Hulsing, II
"A Vibratory Micromechanical Gyroscope", Boxenhorn et al, AIAA Guidance, Navigation and Control Conference, Aug. 15-17, 1988, pp. 1033-1040.
"Monolithic Silicon Accelerometer", Boxenhorn et al, Transduers '89, Proceedings of the 5th Int'l Conference, on Solid-State Sensors . . . , Jun. 25-30, 1989, pp. 273-277.
"An Electrostatically Rebalanced Micromechanical Accelerometer", Boxenhorn et al, AIAA Guidance, Navigation and Control Conference, Aug. 14-16, 1989, pp. 118-122.
"The Micromechanical Inertial Guidance System and Its Application", boxenhorn et al., 14th Biennial Guidance Test Symposium, Oct. 3-5, 1989, pp. 113-131.
"Tensometrie Accelerometers With Overload Protection", Moskalik, Meas. Tech., (USA), vol. 22, No. 12, (May 1980), pp. 1469-1471.
"Micromechanical Accelerometer Integrated with MOS Detection Circuitry", Petersen et al, IEEE Transactions on Electron Devices, vol. ED-29, No. (Jan. 1982), pp. 23-27.
"Quartz Rate Sensor Replaces Gyros", Defense Electronics, Nov. 1984, p. 177.
"A Monolithic Silicon Accelerometer with Integral Air Damping and Overrange Protection", Barth et al. IEEE 1988 pp. 35-38.
"Silicon As A Mechanical Material", Peterson et al., Proceedings of the IEEE, vol. 70, No. 5, May 1982, pp. 420-457.
"Machining In the Micro Domain", Rosen, Mechanical Engineering, Mar. 1989, pp. 40-46.
"Silicon micromechanics: sensors and actuators on a chip", Howe et al., IEEE Spectrum, Jul. 1990, pp. 29-35.
"Novel Electromechanical Micro-Machining and Its Application for Semiconductor Acceleration Sensor IC", M. Nakamura et al., Digest of Technical Papers, (1987), Institute of Electrical Engineers of Japan, pp. 112-115.
Powell William
The Charles Stark Draper Laboratory Inc.
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