Thin-film ROM devices and their manufacture

Details Thin-film ROM devices and their manufacture Thin-film ROM devices and their manufacture

1992-06-23

1993-12-21

Hille, Rolf

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

257478, 257486, 365103, 365105, H01L 4500, G11C 1706

Patent

active

052723704

ABSTRACT:
A thin-film ROM device includes an array of open circuit and closed-circuit cells (5 to 8) formed from a stack of thin films (12,21,22,23,11) on a glass or other substrate (10). The semiconductor films (21,22,23) may be of hydrogenated amorphous silicon. At least one of the semiconductor films (21,22,23) is removed from some of the closed-circuit cell areas (5,7,8) before depositing the next film. In this way, at least a second type of thin-film diode (MIM, MIN, MIP) is formed having a different conduction characteristic to that of a first type (NIP), so increasing the information content of the ROM array. A lower semiconductor film (23) can be readily etched away from the lower electrode film (11) by a selective etching treatment in which the electrode film (11) acts as an etch stop. By monitoring emissions during plasma etching, an upper semiconductor film (21 or 22) can be removed from a lower semiconductor film (22 or 23). PN diodes and back-to-back PNP or NPN or PINIP or NIPIN diodes may be formed for some of the closed-circuit cells.

REFERENCES:
patent: 4229755 (1980-10-01), Custode
patent: 4233671 (1980-11-01), Gerzberg et al.
patent: 4462088 (1984-06-01), Giulilani et al.
patent: 4727409 (1988-02-01), Conner et al.
patent: 5060034 (1991-10-01), Shimizu et al.
patent: 5101249 (1992-03-01), Hijiya et al.

Affiliated with

Also associated with

Rating

Thin-film ROM devices and their manufacture does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Thin-film ROM devices and their manufacture, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thin-film ROM devices and their manufacture will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-310904