Scanning microscope and a method of operating such a scanning mi

Details Scanning microscope and a method of operating such a scanning mi Scanning microscope and a method of operating such a scanning mi

1992-09-17

1994-01-04

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250311, 250306, 250307, H01J 3728, G02B 2100

Patent

active

052763250

ABSTRACT:
A scanning microscope, such as a scanning electron microscope, has an energy beam which is caused to scan on a sample. A detector detects the interaction of the beam with the sample and generates sample image signals which are used to generate a display image of the scanned part of the sample. The sample image signals may be stored in an image memory, and a part of those sample image signals are read to generate the display image. This permits an effective magnification to be achieved without scanning the sample with scanning lines which are too close. Alternatively, or in addition, the beam may be cut intermittently during the scanning, at least for magnification above a predetermined limit. Where scanning is in a series of frames, each formed of a series of scanning lines, such cutting may change the interval between frames, the interval between lines, or may cause intermittent cutting within a line. All these changes reduce the duration of the beam on the sample, thereby reducing the risk of excessive charge build-up.

REFERENCES:
patent: 4031390 (1977-06-01), Muller et al.
patent: 4091374 (1978-05-01), Muller et al.
patent: 4189641 (1980-02-01), Katagiri et al.
patent: 4604523 (1986-08-01), Knowles et al.

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