Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2001-04-12
2003-07-15
Wilson, Allan R. (Department: 2815)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
C257S413000, C257S379000, C257S380000, C257S761000, C257S762000
Reexamination Certificate
active
06593634
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a semiconductor device and a method of manufacturing the same. More particularly, the present invention relates to an insulated gate field effect transistor characterized by its gate electrode, and to a method of manufacturing the same.
2. Description of the Related Art
In insulated gate field effect transistors used for current semiconductor integrated circuits, a polycrystalline silicon layer doped with high concentration of impurities is generally used as a gate electrode in order to decrease the resistance. In a semiconductor process used for CMOS circuits (Complimentary MOSFET circuits), N-type polycrystalline silicon and P-type polycrystalline silicon are respectively used for an N-channel MOSFET (NMOSFET) and a P-channel MOSFET (PMOSFET) as gate electrode materials for balancing the characteristics. Generally, a refractory metal silicide layer is formed in the upper layer of the gate electrode in order to further decrease the resistance.
However, depletion occurs in the polysilicon layer of the gate electrode although the polysilicon layer is doped with high concentration of impurities. Occurrence of depletion is equivalent to the condition in which a capacitance is inserted into the gate electrode in series, thereby decreasing an effective electric field applied to a channel. As a result, the current drive capability of the MOSFET decreases. It is difficult to decrease the resistance of the entire gate electrode to 5&OHgr;/□ or less even if a silicide layer is laminated on the polycrystalline silicon layer. In the case of miniaturizing the device to the 0.1 micron generation, since the thickness of the gate electrode must be reduced, the gate electrode is required to have a specific resistance of about 30 &mgr;&OHgr;·cm or less.
The work functions of the N-type polycrystalline silicon layer and the P-type polycrystalline silicon layer, which are directly in contact with the gate insulation layer, are respectively 4.15 eV and 5.25 eV. The work functions of these layers significantly differ from the center of the bandgap of silicon (4.61 eV). Such a large difference results in an increase in the absolute value of a flat band voltage V
FB
in a MOS capacitor formed of a metal-insulation layer-semiconductor (signs differ between NMOSFET and PMOSFET). Therefore, in such MOSFETs, an optimum value of the impurity concentration in the channel must be shifted to the high concentration side in order to control a threshold value V
TH
. The channel with high-concentration impurities is significantly influenced by carrier scattering due to impurities. As a result, carrier mobility in the channel decreases. This means a decrease in the current drive capability of the MOSFET, thereby significantly affecting the response characteristics of the circuit.
In order to solve these problems, low-resistance gate electrode materials which do not cause gate depletion to occur and have various work functions have been proposed. For example, Jeong-Mo Hwang, et al. (IEDM Technical Digest 1992, page 345) discloses a structure using a titanium nitride (TiN) layer. Ushiki, et al. (IEDM Technical Digest 1996, page 117) discloses a structure using a beta-tantalum (&bgr;-Ta) layer.
The following is pointed out for the gate electrode having a TiN layer formed on a gate insulation layer used in the N-type or P-type MOSFET. Since the TiN layer has a relatively high specific resistance of about 200 &mgr;&OHgr;·cm, a metal (tungsten, for example) layer is laminated on the TiN layer in order to decrease resistance of the gate electrode. The work function of the TiN layer (4.7 to 4.8 eV) is close to the center of the bandgap of silicon (4.61 eV), as reported by Jeong-Mo Hwang, et al., whereby a significant effect is expected in view of the threshold value control.
However, according to this configuration example, since the TiN layer and the tungsten layer are dissolved in a chemical solution such as a hydrogen peroxide aqueous solution and sulfuric acid, it is very difficult to clean the gate electrode layer after etching. Therefore, devices having this structure cannot be manufactured at high yield.
The following is pointed out for the gate electrode having a tantalum layer formed on the gate insulation layer used in the N-type or P-type MOSFET. According to this configuration example, only a beta-tantalum layer exhibiting high resistance as a metal (specific resistance: about 160 &mgr;&OHgr;·cm) can be deposited as the tantalum layer, whereby the resistance of the gate electrode relatively increases. Moreover, since the work function of the beta-tantalum layer significantly differs from the center of the bandgap of silicon, the threshold value is shifted to the low threshold side, thereby resulting in an imbalance threshold between the NMOSFET and the PMOSFET.
SUMMARY OF THE INVENTION
An objective of the present invention is to provide a semiconductor device which exhibits high current drive capability and can be manufactured at high yield, and a method of manufacturing the same.
A semiconductor device according to one aspect of the present invention comprises:
first and second impurity diffusion layers forming a source region and a drain region which are formed in a semiconductor layer;
a channel region formed between the first and second impurity diffusion layers;
a gate insulation layer formed at least on the channel region; and
a gate electrode formed on the gate insulation layer,
wherein the gate electrode includes a tantalum nitride layer formed in a region in contact with at least the gate insulation layer.
The semiconductor device according to this aspect of the present invention has the following actions and effects.
(1) The gate electrode includes the tantalum nitride layer formed so as to be in contact with the gate insulation layer. The work function of the tantalum nitride layer is approximately 4.5 eV, which is extremely close to the center of the bandgap of silicon. As a result, the absolute value of a flat band voltage in a capacitor formed of metal-insulation layer-silicon can be decreased. This eliminates the need for increasing the concentration of impurities doped into the channel region in order to obtain an appropriate threshold value. Therefore, a decrease in carrier mobility can be prevented, whereby a insulated gate field effect transistor exhibiting high current drive capability can be obtained at high yield.
(2) As described in the above (1), the work function of the tantalum nitride layer is extremely close to the center of the bandgap of silicon. Because of this, the difference in the absolute values of the flat band voltages between an N-channel insulated gate field effect transistor and a P-channel insulated gate field effect transistor can be significantly decreased in a capacitor formed of metal-insulation layer-silicon, although the same type of electrode is used for the both transistors. As a result, in a complementary semiconductor device including both an N-channel insulated gate field effect transistor and a P-channel insulated gate field effect transistor, the threshold balance between these transistors can be accurately and easily controlled. Moreover, use of the same type of the electrode reduces the fabrication steps in comparison with above-described conventional polysilicon gates. Furthermore, in the case of a complementary semiconductor device using a fully depleted silicon on insulator (SOI) structure or silicon on nothing (SON) structure, the absolute value of the threshold voltage can be decreased while preventing punch-through from occurring. This leads to advantages in miniaturization and low-voltage drive.
(3) The gate electrode includes at least the tantalum nitride layer, and the polysilicon layer is not in contact with the gate electrode. Therefore, depletion does not occur in the gate electrode. As a result, the gate electrode can prevent effective electric field applied to the channel region from decreasing in comparison with the case of using a polysilicon l
Ohmi Tadahiro
Shimada Hiroyuki
Fenty Jesse A
Hogan & Hartson LLP
Seiko Epson Corporation
Wilson Allan R.
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