Mercury probe

Details Mercury probe Mercury probe

1979-06-21

1985-11-05

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158P, 339118R, G01R 106, G01R 3102

Patent

active

RE0320242

ABSTRACT:
The disclosed apparatus provides a mercury electrode for making non-destructive tests, especially for Schottky-diode tests of semi-conductors such as silicon. By developing vacuum under a test wafer on a support, a column of mercury is drawn into contact with the test wafer through a bore in the support that accurately establishes the area of the contact. The vacuum system also holds the test wafer securely in position, it avoids spillage of mercury, and additional circuit-completing contact can be made to the wafer with independently controlled pressure.

REFERENCES:
patent: 3345567 (1967-10-01), Turner et al.
patent: 3794912 (1974-02-01), Severin et al.
patent: 4021735 (1977-05-01), Vieweg-Gutberlet et al.
Koens, J. G.; "Micromanipulator Liquid . . . "; IBM Tech. Dis. Bulletin; vol. 15; No. 1; Jun. 1972; p. 344.

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