Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2008-01-29
2008-01-29
Lyons, Michael A. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S497000
Reexamination Certificate
active
07324214
ABSTRACT:
Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parameterized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.
REFERENCES:
patent: 4355903 (1982-10-01), Sandercock
patent: 4576479 (1986-03-01), Downs
patent: 4618262 (1986-10-01), Maydan et al.
patent: 4660980 (1987-04-01), Takabayashi et al.
patent: 4818110 (1989-04-01), Davidson
patent: 4999014 (1991-03-01), Gold et al.
patent: 5042949 (1991-08-01), Greenberg et al.
patent: 5042951 (1991-08-01), Gold et al.
patent: 5112129 (1992-05-01), Davidson et al.
patent: 5129724 (1992-07-01), Brophy et al.
patent: 5133601 (1992-07-01), Cohen et al.
patent: 5135307 (1992-08-01), de Groot et al.
patent: 5301010 (1994-04-01), Jones et al.
patent: 5398113 (1995-03-01), de Groot
patent: 5587792 (1996-12-01), Nishizawa et al.
patent: 5589938 (1996-12-01), Deck
patent: 5602643 (1997-02-01), Barrett
patent: 5774224 (1998-06-01), Kerstens
patent: 5900633 (1999-05-01), Solomon et al.
patent: 6242739 (2001-06-01), Cherkassky
patent: 6249351 (2001-06-01), de Groot
patent: H1972 (2001-07-01), Inoue
patent: 6259521 (2001-07-01), Miller et al.
patent: 6377349 (2002-04-01), Fercher
patent: 6417109 (2002-07-01), Jordan et al.
patent: 6449066 (2002-09-01), Arns et al.
patent: 6500591 (2002-12-01), Adams
patent: 6507405 (2003-01-01), Grek et al.
patent: 6545763 (2003-04-01), Kim et al.
patent: 6597460 (2003-07-01), Groot et al.
patent: 6636322 (2003-10-01), Terashita
patent: 6721094 (2004-04-01), Sinclair et al.
patent: 6940604 (2005-09-01), Jung et al.
patent: 6985232 (2006-01-01), Sezginer
patent: 7106454 (2006-09-01), de Groot et al.
patent: 2002/0135775 (2002-09-01), de Groot et al.
patent: 2002/0196450 (2002-12-01), Olszak et al.
patent: 2003/0112444 (2003-06-01), Yang et al.
patent: 2004/0085544 (2004-05-01), de Groot et al.
patent: 2004/0189999 (2004-09-01), de Groot et al.
patent: 2005/0057757 (2005-03-01), de Lega et al.
patent: 2005/0068540 (2005-03-01), de Groot et al.
patent: 2005/0078318 (2005-04-01), de Groot
patent: 2005/0078319 (2005-04-01), de Groot
patent: 2005/0088663 (2005-04-01), de Groot et al.
patent: 2005/0146727 (2005-07-01), Hill
patent: 2005/0237534 (2005-10-01), Deck
patent: 2006/0012582 (2006-01-01), de Lega
patent: 2007/0097380 (2007-05-01), De Groot et al.
patent: 4108944 (1992-09-01), None
patent: 4309056 (1994-09-01), None
patent: 0 397 388 (1990-11-01), None
patent: 0 549 166 (1993-06-01), None
patent: 0 617 255 (1994-09-01), None
patent: 0 929 094 (1999-07-01), None
patent: 2385417 (2003-08-01), None
patent: WO 97/44633 (1997-11-01), None
patent: WO 02/082008 (2002-10-01), None
patent: WO 03/062802 (2003-07-01), None
C. Akcay et al., “Spectral shaping to improve the point spread function in optical coherence tomography”,Optics Letters, vol. 28, No. 20, pp. 1921-1923 (Oct. 15, 2003).
R.M.A. Azzam et al., “Reflection and Transmission of Polarized Light by Stratified Planar Structures”,Ellipsometry and Polarized Light, Elsevier Science B.V. ISBN 0 444 87016 4 (Paperback) pp. 267-363 (1987).
M. Bashkansky et al., “Signal Processing for Improving Field Cross-correlation Function in Optical Coherence Tomography”,Supplement to Optics&Photonics News, 9(5) (May 1998).
A. Bosseboeuf et al., “Application of microscopic interferometry techniques in the MEMS field”,Proc. SPIE, 5145, pp. 1-16 (2003).
M. Davidson et al., “An Application of Interference Microscopy to Integrated Circuit Inspection and Metrology”,Proceedings of SPIE, vol. 775, pp. 233-247 (1987).
J.E. Greivenkamp, “Generalized data reduction for heterodyne interferometry”,Opt. Eng., vol. 23 No. 4, pp. 350-352 (Jul./Aug. 1984).
P de Groot et al., “Signal modeling for low coherence height-scanning interference microscopy”,Applied Optics, vol. 43 No. 25, pp. 4821-4830 (Sep. 1, 2004).
P. de Groot, “Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window”,Appl. Opt., 34(22), p. 4723-4730 (1995).
P. de Groot et al., “Signal modeling for modern interference microscopes”,SPIE Proceedings, 5457-4 (2004).
Peter de Groot et al., “Determination of fringe order in white-light interference microscopy”,Appl. Opt., 41(22) pp. 4571-4578 (2002).
Dresel, Thomas et al., “Three-dimensional sensing of rough surfaces by coherence radar”,Applied Optics, vol. 31, No. 7, pp. 919-925 (Mar. 1, 1992).
Feke, Gilbert D. et al., “Interferometric back focal plane microellipsometry”,Applied Optics, vol. 37, No. 10, pp. 1796-1802 (Apr. 1, 1998).
P.A. Flournoy et al., “White-light interferometric thickness gauge”,Appl. Opt., 11(9), pp. 1907-1915 (1972).
G. Hausler et al., “Coherence Radar and Spectral Radar—New Tools for Dermatological Diagnosis”,Journal of Biomedical Optics, vol. 3, No. 1, pp. 21-31 (Jan. 1998).
R.D. Holmes et al., “Scanning microellipsometry for extraction of true topography”,Electronics Letters, vol. 31, No. 5, pp. 358-359 (Mar. 2, 1995).
Seung-Woo Kim et al., “Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry”,Applied Optics, vol. 38, No. 28, pp. 5968-5973 (Oct. 1, 1999).
Kieran G. Larkin, “Efficient nonlinear algorithm for envelope detection in white light interferometry”,J. Opt. Soc. Am A4, pp. 832-843 (1996).
Kino, Gordon S. et al., “Mirau correlation microscope”,Applied Optics, vol. 29, No. 26, pp. 3775-3783 (Sep. 10, 1990).
Lee et al., “Profilometry with a coherence scanning microscope”,Appl. Opt., 29(26), pp. 3784-3788 (1990).
I. Lee-Bennett, “Advances in non-contacting surface metrology”,OF&T Workshop, paper OTuC1 (2004).
K. Leonhardt et al., “Micro-Ellipso-Height-Profilometry”,Optics Communications, vol. 80, No. 3, 4, pp. 205-209 (Jan. 1, 1991).
Y. Liu et al., “Common path interferometric microellipsometry”,SPIE, vol. 2782, pp. 635-645 (1996).
Lyakin et al., “The interferometric system with resolution better than coherence length for determination of geometrical thickness and refractive index of a layer object”,Proceedings of the SPIE—The International Society for Optical Engineering SPIE-INT. Soc. Opt. Eng USA, vol. 4956, pp. 163-169 (Jul. 2003).
C.J. Morgan, “Least-Squares estimation in phase-measurement interferometry”,Apt. Let., 7(8), pp. 368-370 (1982).
Ngoi et al., “Phase-shifting interferometry immune to vibration”,Applied Optics, vol. 40, No. 19, pp. 3211-3214 (2001).
A.V. Oppenheim et al., “10.3: The time-dependent Fourier Transform”,Discrete-Time Signal Processing, 2ndEdition, pp. 714-722 (Prentice Hall, New Jersey, 1999).
M.C. Park et al., “Direct quadratic polynomial fitting for fringe peak detection of white light scanning interferograms”,Opt. Eng, 39(4), pp. 952-959 (2000).
Pelligrand, S. et al., “Mesures 3D de topographies et de vibrations a l'echelle (sub)micrometrique par microscopie optique interferometrique”,Proc. Club CMOI, Methodes et Techniques Optiques pour l'Industrie(2002).
Pluta, Maksymilian, “Advanced Light Microscopy”, vol. 3, (Elsevier, Amsterdam, 1993) pp. 265-271.
W.H. Press et al., “Linear Correlation”,Numerical Recipes in C, Cambridge University Press, 2ndEdition, pp. 636-639 (1992).
Rosencwaig, Allan et al., “Beam profile reflectometry: A new technique for dielectric film measurements”,Applied Physics Letters, vol. 60, No. 11, pp. 1301-1303 (Mar. 16, 1992).
Sandoz, Patrick “Wavelet transform as a proce
Colonna de Lega Xavier
Darwin Michael J
de Groot Peter
Gallatin Gregg M.
Stoner Robert T
Fish & Richardson P.C.
Lyons Michael A.
Zygo Corporation
LandOfFree
Interferometer and method for measuring characteristics of... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Interferometer and method for measuring characteristics of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Interferometer and method for measuring characteristics of... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2801208