Coating apparatus – Immersion or work-confined pool type – Work-confined pool
Reexamination Certificate
2008-01-29
2008-01-29
Edwards, Laura (Department: 1734)
Coating apparatus
Immersion or work-confined pool type
Work-confined pool
C118S423000, C118S428000, C118S429000, C118S321000, C204S227000, C204S232000, C204S242000, C204S267000, C134S902000
Reexamination Certificate
active
07323058
ABSTRACT:
An electroless deposition system is provided. The system includes a processing mainframe, at least one substrate cleaning station positioned on the mainframe, and an electroless deposition station positioned on the mainframe. The electroless deposition station includes an environmentally controlled processing enclosure, a first processing station configured to clean and activate a surface of a substrate, a second processing station configured to electrolessly deposit a layer onto the surface of the substrate, and a substrate transfer shuttle positioned to transfer substrates between the first and second processing stations. The system also includes a substrate transfer robot positioned on the mainframe and configured to access an interior of the processing enclosure.
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Cheboli Ramakrishna
Ellwanger Russell
Lubomirsky Dmitry
Pancham Ian A.
Shanmugasundram Arulkumar
Applied Materials Inc.
Edwards Laura
Patterson & Sheridan LLP
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