Scanning transmission electron microscope

Details Scanning transmission electron microscope Scanning transmission electron microscope

1976-10-08

1978-07-04

Willis, Davis L.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

H01J 3726

Patent

active

040990559

ABSTRACT:
A scanning transmission electron microscope includes means for irradiating with a finely focussed electron beam a sample to be observed within an evacuated chamber, means for scanning the surface of said sample with said electron beam, means for transducing an image of electron beam passed through said sample into an image formed by the light beam, light transmission means for transmitting said light beam image to the outside of said evacuated chamber, light interrupting means adapted to allow a selected part of said light beam image to pass while interrupting the other part of said image and light detecting means adapted to detect said part of said light beam which is allowed by said interrupting means to pass.

REFERENCES:
patent: 2464419 (1949-03-01), Smith
patent: 3626184 (1970-03-01), Crewe
patent: 3835246 (1974-09-01), Muller et al.
patent: 3857034 (1974-12-01), Hoppe
patent: 3889114 (1975-06-01), Oostrum

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