Apparatus and methods for providing in-chip microtargets for...

Details Apparatus and methods for providing in-chip microtargets for... Apparatus and methods for providing in-chip microtargets for...

2008-03-18

2008-03-18

Do, Thuan (Department: 2825)

Computer-aided design and analysis of circuits and semiconductor

Nanotechnology related integrated circuit design

C716S030000

Reexamination Certificate

active

07346878

ABSTRACT:
Disclosed are techniques and apparatus for providing metrology or inspection targets in-chip. That is, targets are integrated within the product device or die area. In general terms, the present invention provides techniques for enabling inspection or metrology on targets within the die or active area. Said in another way, target structures are inserted within the die or active area. In one embodiment, a set of rules are provided for integrating test structures within the die. For example, these rules may be implemented by one or more design engineers or by place-and-route tools which automatically generate the die layout pattern and thereafter insert the target structures into the die layout pattern based on these rules. Location data of each target is then retained during the layout generation and provided to one or more inspection or metrology tools and/or metrology engineers so that each target may be found and then inspected or measured.

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