Antireflective coating composition

Details Antireflective coating composition Antireflective coating composition

2011-08-02

2011-08-02

Hamilton, Cynthia (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

C430S272100, C430S271100, C264S447000, C525S523000

Reexamination Certificate

active

07989144

ABSTRACT:
The present invention relates to an antireflective composition comprising a thermal acid generator and an epoxy polymer comprising at least one unit of structure 1, at least one unit of structure 2,where, R1to R12are independently selected from hydrogen and C1-C4alkyl, structure 1 has a configuration selected from cis, trans or mixture thereof, and x and y are the mole % of the monomeric units in the polymer. The invention also relates to a process for manufacturing a microelectronic device.

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