Shielded gate trench FET with the shield and gate electrodes...

Details Shielded gate trench FET with the shield and gate electrodes... Shielded gate trench FET with the shield and gate electrodes...

2008-01-15

2008-01-15

Pham, Hoai v (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S331000, C257SE29201

Reexamination Certificate

active

07319256

ABSTRACT:
A field effect transistor (FET) includes a plurality of trenches extending into a semiconductor region. Each trench includes a gate electrode and a shield electrode with an inter-electrode dielectric therebetween. The trench extends in an active region of the FET, and the shield electrode and gate electrode extend out of the trench and into a non-active region of the FET where the shield electrode and gate electrode are electrically connected together by a first interconnect layer.

REFERENCES:
patent: 3404295 (1968-10-01), Warner et al.
patent: 3412297 (1968-11-01), Amlinger
patent: 3497777 (1970-02-01), Teszner et al.
patent: 3564356 (1971-02-01), Wilson
patent: 3660697 (1972-05-01), Berglund et al.
patent: 4003072 (1977-01-01), Matsushita et al.
patent: 4011105 (1977-03-01), Paivinen et al.
patent: 4300150 (1981-11-01), Colak
patent: 4324038 (1982-04-01), Chang et al.
patent: 4326332 (1982-04-01), Kenney
patent: 4337474 (1982-06-01), Yukimoto
patent: 4338616 (1982-07-01), Bol
patent: 4345265 (1982-08-01), Blanchard
patent: 4445202 (1984-04-01), Goetze et al.
patent: 4568958 (1986-02-01), Baliga
patent: 4579621 (1986-04-01), Hine
patent: 4636281 (1987-01-01), Buiguez et al.
patent: 4638344 (1987-01-01), Cardwell, Jr.
patent: 4639761 (1987-01-01), Singer et al.
patent: 4673962 (1987-06-01), Chatterjee et al.
patent: 4698653 (1987-10-01), Cardwell, Jr.
patent: 4716126 (1987-12-01), Cogan
patent: 4745079 (1988-05-01), Pfiester
patent: 4746630 (1988-05-01), Hui et al.
patent: 4754310 (1988-06-01), Coe
patent: 4767722 (1988-08-01), Blanchard
patent: 4774556 (1988-09-01), Fujii et al.
patent: 4801986 (1989-01-01), Chang et al.
patent: 4821095 (1989-04-01), Temple
patent: 4823176 (1989-04-01), Baliga et al.
patent: 4824793 (1989-04-01), Richardson et al.
patent: 4853345 (1989-08-01), Himelick
patent: 4868624 (1989-09-01), Grung et al.
patent: 4893160 (1990-01-01), Blanchard
patent: 4914058 (1990-04-01), Blanchard
patent: 4941026 (1990-07-01), Temple
patent: 4961100 (1990-10-01), Baliga et al.
patent: 4967245 (1990-10-01), Cogan et al.
patent: 4969028 (1990-11-01), Baliga
patent: 4974059 (1990-11-01), Kinzer
patent: 4982260 (1991-01-01), Chang et al.
patent: 4990463 (1991-02-01), Mori
patent: 4992390 (1991-02-01), Chang
patent: 5027180 (1991-06-01), Nishizawa et al.
patent: 5034785 (1991-07-01), Blanchard
patent: 5065273 (1991-11-01), Rajeevakumar
patent: 5071782 (1991-12-01), Mori
patent: 5072266 (1991-12-01), Bulucea et al.
patent: 5079608 (1992-01-01), Wodarczyk et al.
patent: 5105243 (1992-04-01), Nakagawa et al.
patent: 5111253 (1992-05-01), Korman et al.
patent: 5126807 (1992-06-01), Baba et al.
patent: 5134448 (1992-07-01), Johnsen et al.
patent: 5142640 (1992-08-01), Iwamatsu
patent: 5156989 (1992-10-01), Williams et al.
patent: 5164325 (1992-11-01), Cogan et al.
patent: 5164802 (1992-11-01), Jones et al.
patent: 5168331 (1992-12-01), Yilmaz
patent: 5168973 (1992-12-01), Asayama et al.
patent: 5188973 (1993-02-01), Omura et al.
patent: 5208657 (1993-05-01), Chatterjee et al.
patent: 5216275 (1993-06-01), Chen
patent: 5219777 (1993-06-01), Kang
patent: 5219793 (1993-06-01), Cooper et al.
patent: 5233215 (1993-08-01), Baliga
patent: 5242845 (1993-09-01), Baba et al.
patent: 5250450 (1993-10-01), Lee et al.
patent: 5262336 (1993-11-01), Pike, Jr. et al.
patent: 5268311 (1993-12-01), Euen et al.
patent: 5275961 (1994-01-01), Smayling et al.
patent: 5275965 (1994-01-01), Manning
patent: 5281548 (1994-01-01), Prall
patent: 5283201 (1994-02-01), Tsang et al.
patent: 5294824 (1994-03-01), Okada
patent: 5298761 (1994-03-01), Aoki et al.
patent: 5300447 (1994-04-01), Anderson
patent: 5300452 (1994-04-01), Chang et al.
patent: 5326711 (1994-07-01), Malhi
patent: 5346834 (1994-09-01), Hisamoto et al.
patent: 5350937 (1994-09-01), Yamazaki et al.
patent: 5365102 (1994-11-01), Mehrotra et al.
patent: 5366914 (1994-11-01), Takahashi et al.
patent: 5389815 (1995-02-01), Takahashi
patent: 5405794 (1995-04-01), Kim
patent: 5418376 (1995-05-01), Muraoka et al.
patent: 5424231 (1995-06-01), Yang
patent: 5429977 (1995-07-01), Lu et al.
patent: 5430311 (1995-07-01), Murakami et al.
patent: 5430324 (1995-07-01), Bencuya
patent: 5436189 (1995-07-01), Beasom
patent: 5438007 (1995-08-01), Vinal et al.
patent: 5438215 (1995-08-01), Tihanyi
patent: 5442214 (1995-08-01), Yang
patent: 5449925 (1995-09-01), Baliga et al.
patent: 5454435 (1995-10-01), Reinhardt
patent: 5473176 (1995-12-01), Kakumoto
patent: 5473180 (1995-12-01), Ludikhuize
patent: 5474943 (1995-12-01), Hshieh et al.
patent: 5488010 (1996-01-01), Wong
patent: 5519245 (1996-05-01), Tokura et al.
patent: 5532197 (1996-07-01), Kim et al.
patent: 5541425 (1996-07-01), Nishihara
patent: 5554552 (1996-09-01), Chi
patent: 5554862 (1996-09-01), Omura et al.
patent: 5567634 (1996-10-01), Hebert et al.
patent: 5567635 (1996-10-01), Acovic et al.
patent: 5572048 (1996-11-01), Sugawara
patent: 5576245 (1996-11-01), Cogan et al.
patent: 5578851 (1996-11-01), Hshieh et al.
patent: 5581100 (1996-12-01), Ajit
patent: 5583065 (1996-12-01), Miwa
patent: 5592005 (1997-01-01), Floyd et al.
patent: 5593909 (1997-01-01), Han et al.
patent: 5595927 (1997-01-01), Chen et al.
patent: 5597765 (1997-01-01), Yilmaz et al.
patent: 5605852 (1997-02-01), Bencuya
patent: 5614749 (1997-03-01), Ueno
patent: 5616945 (1997-04-01), Williams
patent: 5623152 (1997-04-01), Majumdar et al.
patent: 5629543 (1997-05-01), Hshieh et al.
patent: 5637898 (1997-06-01), Baliga
patent: 5639676 (1997-06-01), Hshieh et al.
patent: 5640034 (1997-06-01), Malhi
patent: 5648283 (1997-07-01), Tsang et al.
patent: 5648670 (1997-07-01), Blanchard
patent: 5656843 (1997-08-01), Goodyear et al.
patent: 5665619 (1997-09-01), Kwan et al.
patent: 5670803 (1997-09-01), Beilstein, Jr. et al.
patent: 5684320 (1997-11-01), Kawashima
patent: 5689128 (1997-11-01), Hshieh et al.
patent: 5693569 (1997-12-01), Ueno
patent: 5705409 (1998-01-01), Witek
patent: 5710072 (1998-01-01), Krautschneider et al.
patent: 5714781 (1998-02-01), Yamamoto et al.
patent: 5717237 (1998-02-01), Chi
patent: 5719409 (1998-02-01), Singh et al.
patent: 5744372 (1998-04-01), Bulucea
patent: 5767004 (1998-06-01), Balasubramanian et al.
patent: 5770878 (1998-06-01), Beasom
patent: 5776813 (1998-07-01), Huang et al.
patent: 5780343 (1998-07-01), Bashir
patent: 5801417 (1998-09-01), Tsang et al.
patent: 5814858 (1998-09-01), Williams
patent: 5821583 (1998-10-01), Hshieh et al.
patent: 5877528 (1999-03-01), So
patent: 5879971 (1999-03-01), Witek
patent: 5879994 (1999-03-01), Kwan et al.
patent: 5894157 (1999-04-01), Han et al.
patent: 5895951 (1999-04-01), So et al.
patent: 5895952 (1999-04-01), Darwish et al.
patent: 5897343 (1999-04-01), Mathew et al.
patent: 5897360 (1999-04-01), Kawaguchi
patent: 5900663 (1999-05-01), Johnson et al.
patent: 5906680 (1999-05-01), Meyerson
patent: 5907776 (1999-05-01), Hshieh et al.
patent: 5917216 (1999-06-01), Floyd et al.
patent: 5929481 (1999-07-01), Hshieh et al.
patent: 5943581 (1999-08-01), Lu et al.
patent: 5949104 (1999-09-01), D'Anna et al.
patent: 5949124 (1999-09-01), Hadizad et al.
patent: 5959324 (1999-09-01), Kohyama
patent: 5960271 (1999-09-01), Wollesen et al.
patent: 5972741 (1999-10-01), Kubo et al.
patent: 5973360 (1999-10-01), Tihanyi
patent: 5973367 (1999-10-01), Williams
patent: 5976936 (1999-11-01), Miyajima et al.
patent: 5977591 (1999-11-01), Fratin et al.
patent: 5981344 (1999-11-01), Hshieh et al.
patent: 5981996 (1999-11-01), Fujishima
patent: 5998833 (1999-12-01), Baliga
patent: 6005271 (1999-12-01), Hshieh
patent: 6008097 (1999-12-01), Yoon et al.
patent: 6011298 (2000-01-01), Blanchard
patent: 6015727 (2000-01-01), Wanlass
patent: 6020250 (2000-02-01), Kenny et al.
patent: 6034415 (2000-03-01), Johnson et al.
patent: 6037202 (2000-03-01), Witek
patent: 6037628 (2000-03-01), Huang
patent: 6037632 (2000-03-01), Omura et al.
patent: 6040600 (2000-03-01), Uenishi et al.
patent: 6048772 (2000-04-01), D'Anna
patent: 6049108 (2000-04-01), Williams et al.
patent: 6051488 (2000-04-01), Lee et al.
patent: 6057558 (2000-05-01), Yamamoto et al.
patent: 6063678 (2000-05-01), D'Anna
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