Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2008-05-13
2008-05-13
Kwok, Helen (Department: 2856)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S295000, C205S071000, C205S116000, C438S717000, C438S738000
Reexamination Certificate
active
07372616
ABSTRACT:
Various embodiments of the invention are directed to various microdevices including sensors, actuators, valves, scanning mirrors, accelerometers, switches, and the like. In some embodiments the devices are formed via electrochemical fabrication (EFAB™).
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Bang Christopher A.
Cohen Adam L.
Evans John D.
Lockard Michael S.
Kwok Helen
Microfabrica Inc.
Smalley Dennis R.
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