Semiconductor devices and methods of manufacturing thereof

Details Semiconductor devices and methods of manufacturing thereof Semiconductor devices and methods of manufacturing thereof

2011-08-30

2011-08-30

Kelly, Cynthia H (Department: 1722)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

Reexamination Certificate

active

08007985

ABSTRACT:
Semiconductor devices and methods of manufacturing thereof are disclosed. A plurality of features is formed on a workpiece, the plurality of features being located in a first region and a second region of the workpiece. Features in the first region have a first lateral dimension, and features in the second region have a second lateral dimension, wherein the second lateral dimension is greater than the first lateral dimension. The first region is masked, and the second lateral dimension of features in the second region is reduced.

REFERENCES:
patent: 6013570 (2000-01-01), Yu et al.
patent: 2002/0142252 (2002-10-01), Ng
patent: 2003/0045118 (2003-03-01), Wu et al.
patent: 2004/0198030 (2004-10-01), Buehrer et al.

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