Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate
2011-08-09
2011-08-09
Duda, Kathleen (Department: 1722)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
C430S330000, C430S329000
Reexamination Certificate
active
07993816
ABSTRACT:
In one embodiment, the present invention provides a method for patterning a surface that includes forming a block copolymer atop a heterogeneous reflectivity surface, wherein the block copolymer is segregated into first and second units; applying a radiation to the first units and second units, wherein the heterogeneous reflectivity surface produces an exposed portion of the first units and the second units; and applying a development cycle to selectively remove at least one of the exposed first and second units of the segregated copolymer film to provide a pattern.
REFERENCES:
patent: 7037744 (2006-05-01), Colburn et al.
patent: 2005/0208430 (2005-09-01), Colburn et al.
patent: 2006/0228653 (2006-10-01), Colburn et al.
Black Charles T.
Colburn Matthew E.
Rath David L.
Duda Kathleen
International Business Machines - Corporation
Morris, Esq. Daniel P.
Scully , Scott, Murphy & Presser, P.C.
Sullivan Caleen O
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