Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate
2011-08-09
2011-08-09
Hassanzadeh, Parviz (Department: 1716)
Coating apparatus
Gas or vapor deposition
Work support
C156S345510
Reexamination Certificate
active
07993460
ABSTRACT:
A substrate support useful for a plasma processing apparatus includes a metallic heat transfer member and an overlying electrostatic chuck having a substrate support surface. The heat transfer member includes one or more passage through which a liquid is circulated to heat and/or cool the heat transfer member. The heat transfer member has a low thermal mass and can be rapidly heated and/or cooled to a desired temperature by the liquid, so as to rapidly change the substrate temperature during plasma processing.
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Buchanan & Ingersoll & Rooney PC
Dhingra Rakesh
Hassanzadeh Parviz
Lam Research Corporation
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