Specimen stage-moving device for charged-particle beam system

Details Specimen stage-moving device for charged-particle beam system Specimen stage-moving device for charged-particle beam system

2011-08-30

2011-08-30

Johnston, Phillip A (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S306000

Reexamination Certificate

active

08008633

ABSTRACT:
A charged-particle beam system is offered which is equipped with a Z-motion mechanism to enable tomography. The Z-motion mechanism includes a rotary disk having three tapering surfaces on which balls are nested. The rotary disk is rotated via a worm gear to cause the balls to go upward along the tapering surfaces. This pushes an overlying elevatable disk upward, i.e., in the Z-direction. Consequently, the specimen stage is pushed up in the Z-direction.

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