Flexible display device having enhanced thin film...

Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of substrate or post-treatment of coated substrate

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C427S248100, C427S554000

Reexamination Certificate

active

07964250

ABSTRACT:
A manufacturing method for a flat panel display device includes forming a barrier layer on a flexible plastic substrate by RF sputtering, forming an amorphous silicon layer on the plastic substrate, and subjecting the amorphous silicon layer to a rapid heat treatment so as to thereby improve electrical characteristics and/or homogeneity of the amorphous silicon layer.

REFERENCES:
patent: 5529630 (1996-06-01), Imahashi et al.
patent: 5738909 (1998-04-01), Thakur et al.
patent: 2001/0034075 (2001-10-01), Onoya
patent: 2002/0132452 (2002-09-01), Oka et al.
patent: 2003/0000475 (2003-01-01), Voutsas et al.
patent: 2004/0016924 (2004-01-01), Yamada et al.
patent: 2005/0082537 (2005-04-01), Arao et al.
patent: 2006/0030085 (2006-02-01), Park et al.
patent: 2000-058836 (2000-02-01), None
patent: 2000-068518 (2000-03-01), None
patent: 2000-081642 (2000-03-01), None
patent: 2001-332734 (2001-11-01), None
patent: 2004-311895 (2004-11-01), None
patent: 2004-311895 (2004-11-01), None
patent: 2004-342753 (2004-12-01), None
patent: 10-2002-36916 (2002-05-01), None
patent: 10-2003-47571 (2003-06-01), None
patent: 10-2005-25239 (2005-03-01), None
patent: 10-2005-103813 (2005-08-01), None
patent: WO 2005/050754 (2005-06-01), None
Yang et al, Stability of low-temperature amorphous silicon thin film transistors formed on glass and transparent plastic substrates, J. Vac. Sci. Technol. B 18(2), 2000, p. 683-689.
Rebib et al, Structural and optical investigations of SiOxNy thin films deposited by R.F. sputtering, Surface & Coatings Technology 200, 2005, p. 330-333.
Pinard et al, Synthesis and physiochemical characterization of silicon oxynitride thin films prepared by rf magnetron sputtering, Applied Optics, vol. 36, Issue 22, 1997, p. 5451-5460.
Choi et al, Novel method for fabrication of hydrogenated amorphous silicon and high quality poly-Si films on the same substrate by employing excimer laser, Mater. Res. Soc. Symp. Proc., vol. 467, 1997, Abstract.
Liu et al, Low-energy excitations in amorphous films of silicon and germanium, Physical Review B, vol. 58, No. 14, 1998, p. 9067-9081.
Serikawa et al, Low-temperature fabrication of high-mobility poly-si TFT's for large-area LCD's, IEEE Transactions on Electron Devices, vol. 36, No. 9, 1989, p. 1929-1933.
English Language Abstract, JP Patent First Publication No. 2000-058836, Feb. 25, 2000, 1 page.
English Language Abstract, JP Patent First Publication No. 2000-068518, Mar. 3, 2000, 1 page.
English Language Abstract, JP Patent First Publication No. 2004-342753, Dec. 2, 2004, 1 page.
English Language Abstract, KR Patent First Publication No. 10-2002-36916, May 17, 2002, 1 page.
English Language Abstract, KR Patent First Publication No. 10-2003-47571, Jun. 18, 2003, 1 page.
English Language Abstract, KR Patent First Publication No. 10-2005-25239, Mar. 14, 2005, 1 page.
English Language Abstract, KR Patent First Publication No. 10-2005-103813, Aug. 19, 2005, 1 page.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Flexible display device having enhanced thin film... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Flexible display device having enhanced thin film..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Flexible display device having enhanced thin film... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2723841

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.