System and method for semiconductor processing

Details System and method for semiconductor processing System and method for semiconductor processing

2011-01-11

2011-01-11

Ghyka, Alexander G (Department: 2812)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S795000, C257SE21170

Reexamination Certificate

active

07867905

ABSTRACT:
Systems and methods are disclosed to perform semiconductor processing with a process chamber; a flash lamp adapted to be repetitively triggered; and a controller coupled to the control input of the flash lamp to trigger the flash lamp. The system can deploy a solid state plasma source in parallel with the flash lamp in wafer processing.

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“Design Considerations for Triggering of Flashlamps,” A. McLeod, http://optoelectronics.perkinelmer.com/content/whitepapers/TriggeringFlashlamps.pdf, 1998.

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