Data processing: measuring – calibrating – or testing – Testing system – Including program set up
Reexamination Certificate
2011-08-16
2011-08-16
Tsai, Carol S (Department: 2857)
Data processing: measuring, calibrating, or testing
Testing system
Including program set up
C702S127000, C702S155000, C702S134000, C378S137000, C356S237400, C356S237500
Reexamination Certificate
active
08000922
ABSTRACT:
Methods and systems for generating information to be used for selecting values for parameter(s) of a detection algorithm are provided. One method includes without user intervention performing a scan of an area of a wafer using an inspection system and default values for parameter(s) of a detection algorithm to detect defects on the wafer. The method also includes selecting a portion of the defects from results of the scan based on a predetermined maximum number of total defects to be used for selecting values for the parameter(s) of the detection algorithm. The method further includes storing information, which includes values for the parameter(s) of the detection algorithm determined for the defects in the portion. The information can be used to select the values for the parameter(s) of the detection algorithm to be used for the inspection recipe without performing an additional scan of the wafer subsequent to the scan.
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Balakrishnan Subramanian
Becker Barry
Chen Chien-Huei (Adam)
Chen Hong
Chen Stephanie
KLA-Tencor Corp.
Mewherter Ann Marie
Tsai Carol S
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