Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2011-01-25
2011-01-25
Kim, Peter B (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
Reexamination Certificate
active
07876418
ABSTRACT:
A liquid immersion exposure apparatus includes a projection optical system (PL) which projects an image of a pattern onto a substrate (W) and a unit (5) which supplies a liquid (7) between an optical element (4) at the end of the projection optical system (PL) and the substrate (W). A corrosion-resistant film composed of an oxide is formed on the surface of the optical element (4) to prevent corrosion by the liquid (7). Consequently, a desired performance of the projection optical system can be secured for a long time even where a full field exposure in the step-and-repeat manner or a scanning exposure in the step-and-scan manner is performed in a liquid-immersion state.
REFERENCES:
patent: 3706485 (1972-12-01), Fawcett et al.
patent: 4346164 (1982-08-01), Tabarelli et al.
patent: 4480910 (1984-11-01), Takanashi et al.
patent: 4500611 (1985-02-01), Nickol et al.
patent: 4568140 (1986-02-01), van der Werf et al.
patent: 4954372 (1990-09-01), Sako et al.
patent: 5067781 (1991-11-01), Montanari et al.
patent: 5139879 (1992-08-01), Aharoni et al.
patent: 5494743 (1996-02-01), Woodard et al.
patent: 5610683 (1997-03-01), Takahashi
patent: 5648860 (1997-07-01), Ooi et al.
patent: 5715039 (1998-02-01), Fukuda et al.
patent: 5825043 (1998-10-01), Suwa
patent: 5882773 (1999-03-01), Chow et al.
patent: 5962079 (1999-10-01), Koberstein et al.
patent: 5993898 (1999-11-01), Nagatsuka
patent: 6084846 (2000-07-01), Jordache et al.
patent: 6166855 (2000-12-01), Ikeyama et al.
patent: 6191429 (2001-02-01), Suwa
patent: 6417974 (2002-07-01), Schuster
patent: 6556353 (2003-04-01), Omura
patent: 6574039 (2003-06-01), Murata et al.
patent: 6628574 (2003-09-01), Shimazaki et al.
patent: 6867844 (2005-03-01), Vogel et al.
patent: 6914665 (2005-07-01), Ishikawa
patent: 7129009 (2006-10-01), French et al.
patent: 7393469 (2008-07-01), Benrashid et al.
patent: 2001/0043320 (2001-11-01), Kato et al.
patent: 2002/0005990 (2002-01-01), Watanabe
patent: 2003/0030916 (2003-02-01), Suenaga
patent: 2003/0142409 (2003-07-01), Ohtsu et al.
patent: 2004/0075895 (2004-04-01), Lin
patent: 2004/0119954 (2004-06-01), Kawashima et al.
patent: 2004/0165159 (2004-08-01), Lof et al.
patent: 2005/0007567 (2005-01-01), Pierrat et al.
patent: 2005/0094119 (2005-05-01), Loopstra et al.
patent: 2005/0100745 (2005-05-01), Lin et al.
patent: 2005/0213066 (2005-09-01), Sumiyoshi
patent: 2005/0225737 (2005-10-01), Weissenrieder et al.
patent: 2005/0225738 (2005-10-01), Shirai
patent: 2005/0237504 (2005-10-01), Nagasaka et al.
patent: 2005/0248856 (2005-11-01), Omura et al.
patent: 2006/0087725 (2006-04-01), Arriola
patent: 2006/0203218 (2006-09-01), Shirai et al.
patent: 2007/0188879 (2007-08-01), Ikezawa et al.
patent: 2007/0201011 (2007-08-01), Kokubun et al.
patent: 221 563 (1985-04-01), None
patent: 224 448 (1985-07-01), None
patent: 0 834 773 (1998-04-01), None
patent: 1 152 263 (2001-11-01), None
patent: 1 172 670 (2002-01-01), None
patent: 1 510 871 (2005-03-01), None
patent: 1 571 700 (2005-09-01), None
patent: 1 646 074 (2006-04-01), None
patent: A-57-153433 (1982-09-01), None
patent: A-58-202448 (1983-11-01), None
patent: A-59-19912 (1984-02-01), None
patent: A-62-65326 (1987-03-01), None
patent: A-62-121417 (1987-06-01), None
patent: A-63-157419 (1988-06-01), None
patent: A-4-305915 (1992-10-01), None
patent: A-04-305915 (1992-10-01), None
patent: A-4-305917 (1992-10-01), None
patent: A-04-305917 (1992-10-01), None
patent: A-05-62877 (1993-03-01), None
patent: A-5-62877 (1993-03-01), None
patent: A-6-124873 (1994-05-01), None
patent: A-07-220990 (1995-08-01), None
patent: A-7-220990 (1995-08-01), None
patent: A-8-316125 (1996-11-01), None
patent: A. 10-154659 (1998-06-01), None
patent: A 10-154659 (1998-06-01), None
patent: A-10-163099 (1998-06-01), None
patent: A-10-214783 (1998-08-01), None
patent: A-10-303114 (1998-11-01), None
patent: A-10-340846 (1998-12-01), None
patent: A-11-176727 (1999-07-01), None
patent: A-11-264903 (1999-09-01), None
patent: A-2000-58436 (2000-02-01), None
patent: A 2000-58436 (2000-02-01), None
patent: A-2000-131503 (2000-05-01), None
patent: A-2000-505958 (2000-05-01), None
patent: A 2001-91849 (2001-04-01), None
patent: A-2002-244035 (2002-08-01), None
patent: A-2004-207711 (2004-07-01), None
patent: A-2004-259966 (2004-09-01), None
patent: WO 98/28665 (1998-07-01), None
patent: WO99/49504 (1999-09-01), None
patent: WO 2004/019128 (2004-03-01), None
patent: WO 2004/053950 (2004-06-01), None
patent: WO 2004/053951 (2004-06-01), None
patent: WO 2004/107048 (2004-12-01), None
M. Switkes et al., “Immersion Liquids for Lithography in the Deep Ultraviolet”, Optical Microlithography XVI, 2003, pp. 690-699, vol. 5040.
Aug. 13, 2007 Supplementary European Search Report in European Application No. 03 77 8771.
Apr. 28, 2010 Office Action in U.S. Appl. No. 11/416,110.
Jan. 7, 2010 Office Action in U.S. Appl. No. 11/416,110.
Feb. 1, 2010 Office Action in U.S. Appl. No. 11,546,298.
Aug. 3, 2006 Office Action in U.S. Appl. No. 11/416,110.
Jan. 29, 2007 Office Action in U.S. Appl. No. 11/416,110.
Jul. 26, 2007 Office Action in U.S. Appl. No. 11/416,110.
Apr. 4, 2008 Office Action in U.S. Appl. No. 11/416,110.
Mar. 4, 2009 Office Action in U.S. Appl. No. 11/416,110.
Jun. 19, 2009 Office Action in U.S. Appl. No. 11/546,298.
Kim Peter B
Nikon Corporation
Oliff & Berridg,e PLC
LandOfFree
Optical element and projection exposure apparatus based on... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Optical element and projection exposure apparatus based on..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical element and projection exposure apparatus based on... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2662688