Stackable cassette for use with wafer cassettes

Details Stackable cassette for use with wafer cassettes Stackable cassette for use with wafer cassettes

1998-05-22

2000-12-19

Brahan, Thomas J.

Material or article handling

Device for emptying portable receptacle

Nongravity type

414937, 414940, B65G 4907

Patent

active

061620068

ABSTRACT:
A stackable cassette for testing at least one separate wafer during the processing of a plurality of semiconductor wafers is disclosed. The stackable cassette includes a bottom surface which conforms to a top portion of a base cassette having a plurality of wafers. In addition, the stackable cassette includes two or more supports which extend vertically from the bottom surface and a top surface horizontally connected to the two supports. The supports include ribs which form channels for holding at least one wafer. When processing the plurality of wafers, the stackable cassette is placed on top of a base cassette. A specified processed wafer is placed within the stackable cassette. The stackable cassette is then removed for inspection of the test wafer.

REFERENCES:
patent: 5217340 (1993-06-01), Harada et al.
patent: 5377476 (1995-01-01), Bohmer et al.
patent: 5664679 (1997-09-01), Schneider et al.
patent: 5685684 (1997-11-01), Kato et al.
patent: 5772386 (1998-06-01), Mages et al.
patent: 5940175 (1999-08-01), Sun

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