Semiconductor device structure with a tapered field plate...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S328000, C257S329000

Reexamination Certificate

active

07989881

ABSTRACT:
A vertically oriented self terminating semiconductor device such as a discrete trench MOS device (10, 38) that includes a cylindrical drift region (18) that extend downward from a surface region to a substrate (11) and a dielectric region (20) that exponentially tapers outward from the cylindrical drift region as the drift region approaches the substrate. A field plate electrode (12) is disposed on the dielectric region. Alternatively, the gate electrode (40, 46) may be disposed on the dielectric region, optionally with an underlying field plate electrode (48).

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patent: 6555873 (2003-04-01), Disney et al.
patent: 2002/0066926 (2002-06-01), Hshieh et al.
patent: 2003/0197220 (2003-10-01), Disney
patent: 2008/0128743 (2008-06-01), Letavic et al.
patent: 2010/0096692 (2010-04-01), Saito et al.
patent: 2010/0151643 (2010-06-01), Hirler

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