Processing multilayer semiconductors with multiple heat sources

Details Processing multilayer semiconductors with multiple heat sources Processing multilayer semiconductors with multiple heat sources

2011-07-26

2011-07-26

Campbell, Thor S (Department: 3742)

Electric resistance heating devices

Heating devices

Radiant heater

C392S407000, C392S418000, C702S130000

Reexamination Certificate

active

07986871

ABSTRACT:
A method of adjusting the heat transfer properties within a processing chamber is presented. Chamber properties may be determined and adjusted by adjusting the thermal mass of an edge ring disposed in the processing chamber.

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