Method for fabricating a three-dimensional capacitor

Details Method for fabricating a three-dimensional capacitor Method for fabricating a three-dimensional capacitor

2011-02-15

2011-02-15

Warren, Matthew E (Department: 2815)

Semiconductor device manufacturing: process

Making passive device

Stacked capacitor

C438S238000, C438S239000, C438S240000, C438S381000, C438S393000, C257SE21010, C257S306000, C257S310000

Reexamination Certificate

active

07888231

ABSTRACT:
A capacitor and a method of fabricating the capacitor are provided herein. The capacitor can be formed by forming two or more dielectric layers and a lower electrode, wherein at least one of the two or more dielectric layers is formed before the lower electrode is formed.

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