Surface inspection method and surface inspection device

Details Surface inspection method and surface inspection device Surface inspection method and surface inspection device

2011-03-15

2011-03-15

Toatley, Gregory J (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

C356S237600, C356S369000

Reexamination Certificate

active

07907268

ABSTRACT:
A surface inspection method inspects a surface of a wafer having a repeated pattern formed by double patterning. The method includes: a first step (S121) which applies an inspection light to a surface of a wafer; a second step (S122) which detects a diffracted light from the surface of the wafer to which the inspection light has been applied; and a third step (S123) which checks whether a defect is present in the repeated pattern according to the diffracted light detected in the second step. The second step detects a diffracted light corresponding to a pattern having a pitch multiplied by 2 with respect to the pitch of the repeated pattern.

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