MEMS sensor

Details MEMS sensor MEMS sensor

2011-03-01

2011-03-01

Richards, N Drew (Department: 2895)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C257SE29324, C438S157000

Reexamination Certificate

active

07898048

ABSTRACT:
An MEMS sensor is described. The MEMS sensor may include a substrate, a lower thin film provided in contact with a surface of the substrate, and an upper thin film opposed to the lower thin film at an interval on the side opposite to the substrate.

REFERENCES:
patent: 7538471 (2009-05-01), Kurozuka et al.
patent: 2008/0247573 (2008-10-01), Pedersen
patent: 2009/0134492 (2009-05-01), Morris et al.
patent: 2007124306 (2007-05-01), None
patent: WO 98/37388 (1998-08-01), None
Machine translation of JP 2007124306 A.

Affiliated with

Also associated with

Rating

MEMS sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with MEMS sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and MEMS sensor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2628653